Scanner16-xy. 压电扫描台
低温系列，闭环控制最⼩尺⼨压电扫描台
⊙ 紧凑的设计，外形尺⼨：16 * 16 * 9 mm
⊙ 超高真空 & 极低温兼容：2 E-11 mbar & 30 mK
⊙ 无磁材料 纯Ti & BeCu组成，兼容18 Tesla磁场
⊙ ⾼负载：100 g
⊙ ⾏程@300 K：30 * 30 um
⊙ 闭环控制，空间扫描达到 0.3 nm 分辨率
详细参数
| Scanner16-xy | Scanner16-xy.ULT | Scanner16-xy.UHV | Scanner16-xy.ULT.UHV | |
| 底座尺寸 (Footprint) | 16 mm*16 mm | |||
| 高度 (Height) | 9 mm | |||
| 重量 (Weight) | 8 g | |||
| 扫描维度 (Scanning Axies) | X, Y | |||
| 工作环境 (Work Environment) | ||||
| 基础运行环境 (Work Environment) | 温度范围：1.6 – 400 K; 真空度：1E-7 mbar; 最高磁场：18 Tesla | |||
| 极低温 30 mK – 400K (Option 1) | ✔ | ✔ | ||
| 超高真空 2E-11 mbar (Option 2) | ✔ | ✔ | ||
| 材料 (Materials) | ||||
| 主体 (Mainbody) | 纯钛 (Pure Ti) | 铍铜 (BeCu) | 纯钛 (Pure Ti) | 铍铜 (BeCu) |
| 线缆 (Wires) | 磷铜双绞线 (Phosphor Bronze Twisted Paired Wire) 20 cm | |||
| 插针材料 (Pins Materials) | Polyester (Glass Fiber Filled), BeCu | Peek, BeCu | ||
| 插针数目 (Pins) | 每个扫描维度2 pins | |||
| 运动参数 (Motion) | ||||
| 行程 (Travel Range) | 30 um*30 um | |||
| 最大速度@300 K (Max. Velocity) | ~10°/s | |||
| 驱动电压 (Drive Voltage) | Max. 120 V @300 K Max. 200 V @4 K |
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| 最大负载 (Load) | 100 g | |||
| 电容@300 K (Capacitance) | 0.1 uF | |||
| 闭环传感 (Closed-loop Sensor) | ||||
| 空间扫描分辨率 (Resolution) | 0.3 nm | |||
| 线性度误差 (Linearity Error) | Typical ~ 0.1 % | |||
| 可重复性 (Repeatability) | < 10 nm | |||
| 注：低温压电位移台-对导线电阻原则上无要求（建议低于50欧姆）。 *In principle, there is no requirement on the total resistance of wiring used to drive a low temperature piezo-positioner (50 ohm below recommended). |
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关键尺寸图
