Linear25-x-Slim. 压电线性台
低温系列,闭环控制高负载线性位移台
⊙ 紧凑的设计,外形尺⼨:25.4 * 25.4 * 9.5 mm
⊙ 超高真空 & 极低温兼容:2 E-11 mbar & 30 mK
⊙ 无磁材料 纯Ti & BeCu组成,兼容18 Tesla磁场
⊙ ⾼负载 & ⼤推⼒:500 g & 2 N
⊙ ⼤⾏程:6 mm
⊙ 闭环控制,位置传感达到 0.1 um 分辨率
详细参数
Linear25-x | Linear25-x-Slim.ULT | Linear25-x-Slim.UHV | Linear25-x-Slim.ULT.UHV | |
底座尺寸 (Footprint) | 25.4 mm*25.4 mm | |||
高度 (Height) | 9.5 mm | |||
重量 (Weight) | 24 g | |||
工作环境 (Work Environment) | ||||
基础运行环境 (Work Environment) | 温度范围:1.6 – 400 K; 真空度:1E-7 mbar; 最高磁场:18 Tesla | |||
极低温 30 mK – 400K (Option 1) | ✔ | ✔ | ||
超高真空 2E-11 mbar (Option 2) | ✔ | ✔ | ||
材料 (Materials) | ||||
主体 (Mainbody) | 纯钛 (Pure Ti) | 铍铜 (BeCu) | 纯钛 (Pure Ti) | 铍铜 (BeCu) |
线缆 (Wires) | 磷铜双绞线 (Phosphor Bronze Twisted Paired Wire) 20 cm | |||
插针材料 (Pins Materials) | Polyester (Glass Fiber Filled), BeCu | Peek, BeCu | ||
插针数目 (Pins) | Driven – 2 pins Sensor – 3 pins |
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运动参数 (Motion) | ||||
行程 (Travel Range) | 6 mm | |||
最大速度@300 K (Max. Velocity) | ~ 3 mm/s | |||
驱动电压 (Drive Voltage) | Max. 200 V | |||
最大负载 (Load) | 500 g | |||
最大推力 (Dynamic Force) | 2 N | |||
闭环传感 (Closed-loop Sensor) | ||||
位置传感器 (Position Encoder) | 电阻传感器 (Resistive Sensor) | |||
传感器行程 (Encode Range) | 6 mm | |||
分辨率 (Resolution) | ~ 150 nm | |||
可重复性 (Repeatability) | 1-2 um | |||
注:低温压电位移台-对导线电阻原则上无要求(建议低于50欧姆)。 *In principle, there is no requirement on the total resistance of wiring used to drive a low temperature piezo-positioner (50 ohm below recommended). |
关键尺寸图